JPH0376404B2 - - Google Patents

Info

Publication number
JPH0376404B2
JPH0376404B2 JP58087219A JP8721983A JPH0376404B2 JP H0376404 B2 JPH0376404 B2 JP H0376404B2 JP 58087219 A JP58087219 A JP 58087219A JP 8721983 A JP8721983 A JP 8721983A JP H0376404 B2 JPH0376404 B2 JP H0376404B2
Authority
JP
Japan
Prior art keywords
electrode
fixed plate
plate
displacement
transmitting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58087219A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59212711A (ja
Inventor
Koji Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP8721983A priority Critical patent/JPS59212711A/ja
Priority to DE3418566A priority patent/DE3418566C2/de
Priority to US06/611,869 priority patent/US4633249A/en
Publication of JPS59212711A publication Critical patent/JPS59212711A/ja
Publication of JPH0376404B2 publication Critical patent/JPH0376404B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Transmission And Conversion Of Sensor Element Output (AREA)
JP8721983A 1983-05-18 1983-05-18 静電容量型変位検出器 Granted JPS59212711A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP8721983A JPS59212711A (ja) 1983-05-18 1983-05-18 静電容量型変位検出器
DE3418566A DE3418566C2 (de) 1983-05-18 1984-05-18 Verschiebungsdetektor
US06/611,869 US4633249A (en) 1983-05-18 1984-05-18 Displacement detector utilizing change of capacitance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8721983A JPS59212711A (ja) 1983-05-18 1983-05-18 静電容量型変位検出器

Publications (2)

Publication Number Publication Date
JPS59212711A JPS59212711A (ja) 1984-12-01
JPH0376404B2 true JPH0376404B2 (en]) 1991-12-05

Family

ID=13908792

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8721983A Granted JPS59212711A (ja) 1983-05-18 1983-05-18 静電容量型変位検出器

Country Status (1)

Country Link
JP (1) JPS59212711A (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6862668B2 (ja) * 2016-03-25 2021-04-21 ヤマハ株式会社 基板及び位置検出装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE411392B (sv) * 1977-12-09 1979-12-17 Inst Mikrovagsteknik Vid Tekni Metanordning for kapacitiv bestemning av det inbordes leget hos tva relativt varandra rorliga delar

Also Published As

Publication number Publication date
JPS59212711A (ja) 1984-12-01

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